| 硅芯硅棒自动清洗设备的研制 |
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| 引用本文： | 卫晓冲,张峰,田娜. 硅芯硅棒自动清洗设备的研制[J]. 电子工业专用设备, 2011, 40(7): 28-30 |
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| 作者姓名： | 卫晓冲 张峰 田娜 |
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| 作者单位： | 中国电子科技集团公司第二研究所,山西太原,030024 |
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| 摘 要： | 通过分析硅芯硅棒清洗方式的现状,提出其自动清洗设备研制的必要,介绍了全自动硅芯硅棒清洗机的技术参数和工艺流程,详细分析了设备的结构设计,包括工艺清洗系统、传动系统、电气控制系统、排风系统、管路系统和设备主体等。
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| 关 键 词： | 硅芯 硅棒 清洗 腐蚀 |
Development of Silicon Core Silicon Rod Automatic Cleaning Equipment |
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| WEI Xiaochong,ZHANG Feng,TIAN Na. Development of Silicon Core Silicon Rod Automatic Cleaning Equipment[J]. Equipment for Electronic Products Marufacturing, 2011, 40(7): 28-30 |
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| Authors: | WEI Xiaochong ZHANG Feng TIAN Na |
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| Affiliation: | (The 2nd Research Institute of CETC,Taiyuan 030024,China) |
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| Abstract: | Introduced the silicone core silicon rods cleaning method,and fully automatic silicone core silicon rods cleaner main characteristics and technical index,detailed analysis of the equipment cleaning system and structure design. |
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| Keywords: | Silicon core Silicon rod Cleaning Corrosion |
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