| 300mm全自动去胶清洗设备的研制 |
| |
| 引用本文： | 曹秀芳,曹颖杰,祝福生. 300mm全自动去胶清洗设备的研制[J]. 电子工业专用设备, 2011, 40(7): 31-33 |
| |
| 作者姓名： | 曹秀芳 曹颖杰 祝福生 |
| |
| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,101601 |
| |
| 摘 要： | 介绍了一种全自动去胶清洗设备的结构技术,主要从工艺槽体溶液均匀性实现等方面阐述槽体结构。经用户使用证明：该系统运行稳定可靠,工艺灵活,清洗工艺先进。适用150～300 mm晶圆片的去胶、腐蚀、清洗等工艺。
|
| 关 键 词： | 机械手 去胶槽 去胶清洗设备 |
The Design and Development of 300 mm Automatic Removing and Rinsing Machine |
| |
| CAO Xiufang,CAO Yingjie,ZHU Fusheng. The Design and Development of 300 mm Automatic Removing and Rinsing Machine[J]. Equipment for Electronic Products Marufacturing, 2011, 40(7): 31-33 |
| |
| Authors: | CAO Xiufang CAO Yingjie ZHU Fusheng |
| |
| Affiliation: | (The 45th Research Institute of CETC,Beijing 101601,China) |
| |
| Abstract: | This article introduces the configuration technology of Automatic Removing and Rinsing Machine,and mainly ecpatiates the tanks structure for assuring liguor well-proportion.Proved by users： This is stable and reliable;processing are flexible and advanced. |
| |
| Keywords: | Robotic handler Removing benchs Removing and rinsing machine |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
