| 我国IC产业现状发展前景及专用设备发展建议 |
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| 引用本文： | 葛劢冲. 我国IC产业现状发展前景及专用设备发展建议[J]. 半导体技术, 2003, 28(9): 13-17 |
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| 作者姓名： | 葛劢冲 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,101601 |
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| 摘 要： | 概述了国内IC产业现状、发展前景及其专用设备现状与发展前景,针对我国IC专用设备的现状,提出了发展国产IC专用设备和攻占市场主导地位的几点建议。
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| 关 键 词： | IC产业 IC专用设备产业 现状 发展前景 建议 |
| 文章编号： | 1003-353X(2003)09-0013-05 |
The present situation and prospect of domestic IC industry and the devlopment suggestions for Its production equipment |
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| GE Mai-chong. The present situation and prospect of domestic IC industry and the devlopment suggestions for Its production equipment[J]. Semiconductor Technology, 2003, 28(9): 13-17 |
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| Authors: | GE Mai-chong |
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| Abstract: | Summarizes the present situation and development prospect of domestic IC industryand its production equipment, in view of the present situation of our domestic IC productionequipment, make several suggestions for developing domestic IC production equipment and acquir-ing the leading position of IC production equipment. |
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| Keywords: | IC Industry IC Production Equipment Industry Present Situation DevelopmentProspect Suggestions |
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