溶胶—凝胶法制备YBCO超导薄膜微细图形

以甲醇为溶剂，以醋酸铜、醋酸钇和醋酸钡为起始原料，二乙烯三胺、三氟乙酸、丙烯酸为添加剂，采用溶胶-凝胶法制备了具有紫外感光性的YBCO溶胶及其凝胶薄膜，其紫外吸收峰在250nm附近，对应于铜络合物的电子跃迁吸收，随着紫外光的照射，其峰值逐渐降低，凝胶在有机溶剂中的溶解性也发生变化，显示了凝胶薄膜的紫外感光性.基于这一特性，本文提出了一种YBCO 超导薄膜图形制备新方法，即利用凝胶薄膜自身的紫外感光性，使紫外光通过掩模照射薄膜，然后在甲醇中溶洗，进一步热处理，得到了YBCO超导薄膜图形.结果表明，图形化的YBCO薄膜具有较强的c轴取向，超导转变温度T_C达到92K.

Fabrication of the Fine-patterns of YBCO Superconducting Thin Film by Sol-Gel Process

Using methanol as solvent, cupric acetate, yttrium acetate and barium acetate as starting materials, and diethylenetriamine, trifluoroacetic acid, acrylic acid(AA) as chemical additives, the photosensitive YBCO sols and gel films were fabricated by the sol-gel method. The UV absorption peak of the sols and gel films is located at about 250nm, which corresponds to the cuprate complex. The intensity of the absorption peak for the gel films gradually decreases under the UV light irradiation, and the solubility of gel films in some organic solvent as methanol is changed, showing the photosensitivity of the gel films. Utilizing the photosensitivity, the YBCO gel films are irradiated by UV light through a pattern mask and leached by methanol. Thus the fine patterning of YBCO gel film is prepared. After heat treatment, the fine patterning of YBCO film with highly c-axis oriented structure and superconducting transition temperature (T_C) of 92K can be obtained.