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Plasma Diagnosis for Microwave ECR Plasma Enhanced Sputtering Deposition of DLC Films |
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| Authors: | PANG Jianhua LU Wenqi XIN Yu WANG Hanghang HE Jia XU Jun |
| Affiliation: | 1 Key Laboratory of Materials Modification by Laser,Ion and Electron Beams(Dalian University of Technology),Ministry of Education,Dalian 116024,China 2 School of Physics and Optoelectronic Technology,Soochow University,Suzhou 215000,China |
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