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A cryosystem for cooling samples in a secondary-ion mass spectrometer with a static analyzer |
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| Authors: | A. N. Pustovit A. M. Ionov |
| Affiliation: | 1. Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, ul. Akademika Osip’yana 6, Chernogolovka, Moscow oblast, 142432, Russia 2. Institute of Solid State Physics, Russian Academy of Sciences, ul. Akademika Osip’yana 2, Chernogolovka, Moscow oblast, 142432, Russia |
| Abstract: | A cryogenic system for cooling samples in an IMS-4F secondary-ion mass spectrometer with a static analyzer is described. The cryogenic system allows maintenance of the sample temperature with an accuracy of ±1 K in a temperature range of 60–420 K by combining heating and cooling (by using liquid helium or nitrogen). The effect of the sample temperature (300 and 110 K) on the secondary-ion mass spectra of Si and GaAs samples is considered. |
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