基于参数自适应PID控制算法激光准直系统的研制

提出并研制了一种基于参数自适应比例、积分和微分(PID)控制算法的激光准直控制系统,从根本上解决了传统PID控制方法的存在的精度低、实时性差等不足。在50min内,x向(水平方向)的角漂移量为22nm／150mm,y向(垂直方向)的角漂移量为15nm／150nm;x向的平漂移量为26nm／150nm,y向平漂移量为28nm／150nm。实验证明：采用参数自适应PID控制算法,激光准直系统的准值精度和鲁棒性得到显著提高。

Developing of a Laser Beam Alignment System Based on Parameters Self-adaptive PID Control Algorithm

A laser beam alignment system based on parameters self-adaptive proportion,integral and differential(PID) control algorithm was presented.It thoroughly solves the shortages of low accuracy,low frequency-response of traditional PID control method.In 50 minutes,the angle excursion of emergent beam in x direction (horizon direction) is 22 nm/150 nm,in y directioin (vertical direction) is 15 nm/150 mm the displacement excursion of emergent beam in x direction is 26 nm/150 mm,in y direction is 28 nm/150 mm.Experiments shows that accuracy and robustness of the laser alignment system have been greatly improved by employing parameters self-adaptive PID control algorithm.