变间隔法实现三维形貌测量

随着生产的发展，对许多工件提出了测量三维形貌的要求。本文提出了在较大光点间隔下实现小采样间隔三维形貌测量的方法。该方法可不改变测量系统光学结构，通过外加简单的装置改变光点间隔，从而实现小采样间隔的三维形貌测量。论文给出了相应的数学模型、测量步骤，并进行了误差分析。

Three-dimensional Topography Measurement by Changing Distance

With the development of production,measuring three dimensional topography has been in demand for many workpieces.This paper describes the method to measure three dimensional topography in a smaller sampling interval under a larger spacing between lightpoints.In this method,the measurement is realized by adding a simple fitting without changing optical structure of the measurement system.The paper describes its mathematic model,measurement process and analyzes its measurement error.