|
|||||
|
|
Increasing the heat resistance of products made from vitreous silica for semiconductors |
|
| Authors: | G. I. Zhuravlev V. G. Leiv N. G. Serkova V. S. Khotimchenko |
| Affiliation: | (1) Lensovet Leningrad Technical Institute, USSR;(2) State Scientific-Research Institute of Vitreous Silica, USSR |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |