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多晶硅太阳电池低温变温扩散工艺的优化
引用本文:周艺,肖斌,金井升,黄燕,郭长春,欧衍聪.多晶硅太阳电池低温变温扩散工艺的优化[J].可再生能源,2012(4):15-17,20.
作者姓名:周艺  肖斌  金井升  黄燕  郭长春  欧衍聪
作者单位:长沙理工大学;湖南神州光电能源有限公司
基金项目:国家自然科学基金(20976016);长沙市科技局重点攻关项目(K1001020-11)
摘    要:采用少子寿命测试仪对扩散前后的硅片少子寿命进行了分析,当扩散后的方块电阻控制在55~65Ω时,低温变温扩散工艺处理的硅片少子寿命最高达到12.18μs,低温恒温扩散工艺处理的硅片少子寿命为10.67μs,高温恒温扩散工艺处理的硅片少子寿命为8.20μs。低温变温扩散工艺处理的太阳电池分别比传统的低温恒温扩散工艺处理和高温恒温扩散工艺处理的太阳电池转换效率提高0.79%和0.42%。

关 键 词:太阳电池  低温变温扩散  恒温扩散  少子寿命

Polycrystalline silicon solar cell cryogenic variable-temperature diffusion process optimization
ZHOU Yi,XIAO Bin,JIN Jing-sheng,HUANG Yan,GUO Chang-chun,OU Yan-cong.Polycrystalline silicon solar cell cryogenic variable-temperature diffusion process optimization[J].Renewable Energy,2012(4):15-17,20.
Authors:ZHOU Yi  XIAO Bin  JIN Jing-sheng  HUANG Yan  GUO Chang-chun  OU Yan-cong
Affiliation:1(1.Changsha University of Science,Changsha 410114,China;2.Hunan Sun-zone Optoelectronics Energy Co.,Ltd.,Changsha 410205,China)
Abstract:The minority carrier lifetime of polysilicons before and after diffusion were evaluated by the minority carrier lifetime tester.The results showed that when the sheet resistance reached 55~65 Ω,the minority carrier lifetime of polysilicons treated by low variable temperature diffusion,low constant temperature diffusion,and traditional high temperature diffusion were 12.18 μs,10.67 μs and 8.20 μs respectively.Compared the low constant temperature diffusion process with traditional high temperature diffusion process,the solar conversion efficiency treated by low variable temperature diffusion process increased by 0.79% and 0.42%.
Keywords:solar cell  the low variable temperature diffusion  the constant temperature diffusion  the minority carrier lifetime
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