| 一种硅压力传感器的高精度宽温度补偿设计 |
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| 引用本文： | 胡永建.一种硅压力传感器的高精度宽温度补偿设计[J].传感器世界,2010,16(4):17-19,25. |
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| 作者姓名： | 胡永建 |
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| 作者单位： | 西部钻探工程公司吐哈钻井工艺研究院,新疆鄯善,838202 |
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| 摘 要： | 本文提出了一种硅压力传感器的温度补偿方法，同时给出了如何进行温度补偿以及非线性修正的具体算法，实现了硅压力传感器宽温度范围下的高精度测量。
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| 关 键 词： | 硅压力传感器 温度补偿 三次样条插值 |
Design of a high accuracy pressure senor with wide temperature compensation range |
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| HU Yong-jian.Design of a high accuracy pressure senor with wide temperature compensation range[J].Sensor World,2010,16(4):17-19,25. |
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| Authors: | HU Yong-jian |
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| Affiliation: | HU Yong-jian (TuHa Drilling Technology Research Institute of XDEC,Xinjiang 838202,China) |
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| Abstract: | A temperature compensation method for silicon pressure sensor is introduced, and the calculation method how to compensate temperature error and correct nonlinear error are proposed. It makes high accuracy pressure measurement with wide temperature range possible. |
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| Keywords: | silicon pressure sensor temperature compensation cubic spline interpolation |
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