ZrCl4蒸汽沉积法制备高温气冷堆包覆燃料颗粒ZrC涂层

采用ZrCl₄蒸汽、H₂和C₃H₆作为化学反应体系，以Ar为载气，在流化床沉积炉中制备高温气冷堆包覆燃料颗粒ZrC涂层。对所制备涂层进行了分析表征，结果显示：ZrC涂层剖面均匀光滑，无明显孔洞；与内致密热解炭层的界面清晰，厚度约为35μm；涂层主要成分为Zr和C，Zr/C摩尔比接近化学计量比1∶1，其主要相组成为面心立方的ZrC；晶粒生长无明显的择优取向。

Preparation of ZrC Layer of Coated Fuel Particle for High-Temperature Gas-Cooled Reactor by Chemical Vapor Deposition With ZrCl4 Vapor

The ZrC layer of coated fuel particle was successfully prepared in the fluidized bed coating furnace by chemical vapor deposition, using a gas mixture of C_3H_6, ZrCl_4 vapor, H_2 and Ar. It is indicated that the deposited ZrC layer has smooth and compact surface without obvious holes, clear interfaces with inner dense pyrocarbon layer, thickness of 35 μm. Composition and crystal structure analyses indicate that the main elements of ZrC layer are Zr and C, and the Zr/C molar ratio is close to 1:1. Stoichiomet-ric fcc-ZrC was obtained. And non-preferred orientation of grains was observed.