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论等离子体在表面技术中的应用
引用本文:邸柏林.论等离子体在表面技术中的应用[J].表面技术,1995,24(1):1-5.
作者姓名:邸柏林
作者单位:东北大学表面技术研究所
摘    要:介绍了表面技术领域中应用等离子技术的诸种现代工艺及其工作原理;讨论了等离子体在这些工艺过程中的行为作用,由其引发形成的工艺与产品的特点,以及这些工艺的应用发展前景。

关 键 词:表面技术  等离子体  工艺  表面处理

Discussion of the Application of Plasma on Surface Finishing
Di Bailin.Discussion of the Application of Plasma on Surface Finishing[J].Surface Technology,1995,24(1):1-5.
Authors:Di Bailin
Affiliation:Northeastern university
Abstract:Some modern technologies of surface finishing using plasma and their working principles were introduced. The behavior and role of the plasma in these processes and the characteristics of the technologises and their products were indicated. The Application and development of these technologies was discussed.
Keywords:plasma  surface finishing  
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