ULVAC research and development of Cat-CVD applications |
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| Authors: | Shin Asari Tetsushi Fujinaga Masanori Hashimoto Masamichi Harada |
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| Affiliation: | a Institute for Super Materials, ULVAC, Inc., 2500 Hagizono, Chigasaki City, Kanagawa, 253-8543 Japan
b Institute for Semiconductor Technologies, ULVAC, Inc., 1220-1 Suyama, Susono, Shizuoka, 410-1231 Japan |
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| Abstract: | This paper reports the feasibility for industrial implementation of Cat-CVD (Hot-Wire CVD) technology. Some application examples are shown, and their features and problems are described. Cat-CVD is a unique technology which has a lot of possibilities. Some of them will be commercialized in the near future, but the others need a breakthrough for mass production. |
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| Keywords: | Cat-CVD Hot-Wire CVD Silicon nitride Radical Solar cell |
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