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Estimation of moisture barrier ability of thin SiNx single layer on polymer substrates prepared by Cat-CVD method |
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| Authors: | K Saitoh RS Kumar A Masuda |
| Affiliation: | a Material Science Laboratory, Mitsui Chemicals, 580-32 Nagaura, Sodegaura, Chiba 299-0265, Japan b Institute of Materials Research and Engineering, 3 Research Link, 117602, Singapore c Japan Advanced Institute of Science and Technology, Nomi, Ishikawa 923-1292, Japan |
| Abstract: | The SiNx films with the thickness of 50 nm were prepared by Cat-CVD method on the cyclic olefin copolymer (COC) and the polyethylene terephthalate (PET) substrates, and their moisture barrier abilities were evaluated. MOCON measurement method and Ca degradation test showed the moisture permeation results of 0.02 g/(m2 day) for PET substrate and 0.006 g/(m2 day) for COC substrate after SiNx deposition. Applying the simple model of gas barrier property, it was estimated that the Cat-CVD method achieves the high coverage ratio of over 99% for SiNx film on these substrates, and the moisture permeation rate of single SiNx film with the thickness of 50 nm was estimated to be 0.0045 g/(m2 day). |
| Keywords: | Gas barrier film Cat-CVD |
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