Improved transport properties of microcrystalline silicon films grown by HWCVD with a variable hydrogen dilution process |
| |
Authors: | Chisato Niikura Joelle Guillet |
| |
Affiliation: | Laboratoire de Physique des Interfaces et des Couches Minces, CNRS UMR 7647, Ecole Polytechnique, F-91128 Palaiseau, France |
| |
Abstract: | The structure and the transport properties of microcrystalline silicon films prepared by hot-wire/catalytic chemical vapor deposition (HWCVD/Cat-CVD), using different dilution ratios of silane in hydrogen, were investigated. Spectroscopic ellipsometry analysis revealed an increase in the thickness of amorphous incubation layer formed before nucleation and a reduction of the void volume fraction when hydrogen dilution decreases. Thus, a specific microcrystalline silicon film growth process was proposed, based on a variable dilution of silane in hydrogen. For films prepared in such conditions, the formation of the incubation layer was inhibited, which led to a drastic improvement in carrier transport along the growth direction as proved by the diffusion-induced time-resolved microwave conductivity data. |
| |
Keywords: | Hot-wire chemical vapor deposition Microcrystalline silicon Hydrogen dilution Electronic transport |
本文献已被 ScienceDirect 等数据库收录! |
|