表面纳米化材料横截面透射电镜试样的制备

通过严重塑性变形法得到的表面纳米化材料，由于近表层有较高的残余应力，其横截面透射电镜试样的制备比一般的电镜试样困难。介绍了一种机械预减薄后，用Teflon板夹持试样与铜环进行树脂的热固化，再直接用离子减薄的制样方法。对表面纳米化后TCA钛合金的横截面试样制备结果表明，该方法避免了试样弯曲变形，可以得到适合于透射电镜观察的横截面试样。

Preparation for Cross-sectional TEM Specimen Treated by Self Surface Nanocrystallization

On account of the high residual stress in the near surface layer of the surface-nanocrystallized material by severe plastic deformation, it is rather difficult to prepare the cross-sectional specimens for transmission electron microscopy （TEM） observation. A new specimen preparation method was presented that the specimen was ion milled directly after mechanical pre-thinning. The pre-thinned specimen was glued on a copper ring with Gatan G2 epoxy resin and was cured before ion milling. The points were that the pre-thinning procedure was performed by plane grinding and the specimen and the copper ring was retained by two Teflon plates when the resin was being cured. Therefore, the easy-happened bend of the specimen due to the residual stress was eliminated. The experimental results of TCA titanium alloy specimens preparation treated by self surface nanocrystallization showed that the specimens had no bending deformation and had large cross-sectional thin area, The subsequent TEM observation of the specimens was achieved successfully.