MEL‐type Pure‐Silica Zeolite Nanocrystals Prepared by an Evaporation‐Assisted Two‐Stage Synthesis Method as Ultra‐Low‐k Materials

A MEL‐type pure‐silica zeolite (PSZ), prepared by spin‐on of nanoparticle suspensions, has been shown to be a promising ultra‐low‐dielectric‐constant (k) material because of its high mechanical strength, hydrophobicity, and chemical stability. In our previous works, a two‐stage synthesis method was used to synthesize a MEL‐zeolite nanoparticle suspension, in which both nanocrystal yield and particle size of the zeolite suspension increased with increasing synthesis time. For instance, at a crystal yield of 63%, the particle size is 80 nm, which has proved to be too large because it introduces a number of problems for the spin‐on films, including large surface roughness, surface striations, and large mesopores. In the current study, the two‐stage synthesis method is modified into an evaporation‐assisted two‐stage method by adding a solvent‐evaporation process between the two thermal‐treatment steps. The modified method can yield much smaller particle sizes (e.g., 14 vs. 80 nm) while maintaining the same nanocrystal yields as the two‐stage synthesis. Furthermore, the nanoparticle suspensions from the evaporation‐assisted two‐stage synthesis show a bimodal particle size distribution. The primary nanoparticles are around 14 nm in size and are stable in the final suspension with 60% solvent evaporation. The factors that affect nanocrystal synthesis are discussed, including the concentration, pH value, and viscosity. Spin‐on films prepared by using suspensions synthesized this way have no striations and improved elastic modulus (9.67 ± 1.48 GPa vs. 7.82 ± 1.30 GPa), as well as a similar k value (1.91 ± 0.09 vs. 1.89 ± 0.08) to the previous two‐stage synthesized films.