Microstructure and mechanical properties of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering on AISI H13 steel |
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Authors: | Chunyan Yu Shebin Wang Linhai Tian Tianbao Li Bingshe Xu |
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Affiliation: | (1) College of Materials Science and Engineering, Taiyuan University of Technology, Yingze Street 79, Taiyuan, 030024, China;(2) Key Laboratory of Interface Science and Engineering in Advanced Materials, Taiyuan University of Technology, Ministry of Education, Taiyuan, 030024, China;(3) Research Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan, 030024, China |
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Abstract: | CrAlN coatings were deposited on silicon and AISI H13 steel substrates using a modified ion beam enhanced magnetron sputtering
system. At the modified ion beam bombardment, the effects of bias voltage and Al/(Cr + Al) ratio on microstructure and mechanical
properties of the coatings were studied. The X-ray diffraction data showed that all CrAlN coatings were crystallized in the
cubic NaCl B1 structure, showing the (111), (200), and (220) preferential orientation. It is noted that the (111) diffraction
peak intensity decreased and the peaks broadened as the bias voltage increased at the same ratio of Al/Cr targets power, which
is attributed to the variation in the grain size and microstrain. The microstructure observation of the coatings by field
emission scanning electron microscopy cross-section morphology shows that the columnar grain became more compact and dense
with increasing substrate bias voltage and Al concentration. At a substrate bias voltage of −120 V and a Al/(Cr + Al) ratio
of 40%, the coating had the highest hardness (33.8 GPa) and excellent adhesion to the substrate. |
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