燃烧器芯数对CVD熔石英玻璃性能的影响

本文通过数值模拟研究了燃烧器芯数对CVD熔石英玻璃性能的影响,讨论了采用五芯、七芯和九芯三种结构燃烧器时沉积面上的温度、OH^-浓度及SiO₂浓度分布,并分析了不同氢氧当量比的影响规律。结果表明:相比于五芯结构燃烧器和七芯结构燃烧器,采用九芯结构燃烧器可以在沉积面获得更加均匀的SiO₂浓度分布和温度分布;当使用九芯燃烧器时,氢氧当量比为1.5可以提高沉积面上温度、OH^-浓度和SiO₂浓度的分布均匀性,从而有利于提高熔石英玻璃的折射率均匀性。

Effect of Burner Core Number on Properties of CVD Fused Silica Glass

The effect of the number of burner cores on the properties of CVD fused silica glass was studied by numerical simulations. The distributions of temperature, OH^- concentration and SiO₂ concentration at the deposition surface for the five-core, seven-core and nine-core burners were discussed. The influence law of different hydrogen-oxygen equivalence ratios was also analyzed. The results show that compared with the five-core burner and seven-core burner, the nine-core burner obtains more uniform SiO₂ concentration distribution and temperature distribution at the deposition surface. When a nine-core burner is used, a hydrogen-oxygen equivalence ratio of 1.5 improves the distribution uniformity of temperature, OH^- concentration and SiO₂ concentration on the deposition surface, thus improving the refractive index uniformity of fused silica glass.