低电压下静电力驱动的数字微流控芯片

设计并制作了一种基于静电力驱动的数字微流控芯片,用于构建芯片实验室.介绍了静电力驱动原理和芯片制作工艺流程,搭建了驱动检测实验平台.该芯片采用硅作衬底,氧化硅作绝缘层,TiW/Au为驱动电极阵列,氮化硅作介质层,碳氟聚合物为疏水层.由于采用开放式的结构,只需单层共平面控制电极,简化了工艺流程,优化了器件结构;而驱动电极...

Digital microfluidic chip by electrostatic manipulation in low voltage

A digital microfluidic chip by electrostatic manipulation was designed and fabricated for a micro total analysis system. The principle of the electrostatic manipulation was proposed and the fabrication processes and experimental platform were demonstrated. For the chip,the silicon was taken as a substrate,a silicon oxide film as the insulating layer,a TiW/Au film as the electrode array, a Si₃N₄ film as the dielectric layer, and the fluorocarbon polymer as the hydrophobic layer. With an open structure instead of complex sandwich structure, the chip just needed a coplanar controlling electrode with one layer, so the process was simplified greatly. As the electrode array was embeded in the SiO₂,the electric leakage from poor step coverage and dielectric breakdown at the margin were prevented.Furthermore, with thin dielectric layer and fine hydrophobic layer, the manipulating voltage was reduced greatly. Experiments show that,by controlling the sequence of voltage to the electrode array, the droplet can be transported smoothly in the two-dimension planes with a programmable manner at a low voltage of 20 V, and the maximum speed has reached 96 mm/s. The digital microfluidic chip can be used in a Lab-on-chip due to its simple structure and IC compatible fabrication processes.