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Enhanced Optical Transmission through MacEtch‐Fabricated Buried Metal Gratings |
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| Authors: | Runyu Liu Xiang Zhao Christopher Roberts Lan Yu Parsian K. Mohseni Xiuling Li Viktor Podolskiy Daniel Wasserman |
| Affiliation: | 1. Department of Electrical and Computer Engineering, Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL, USA;2. Department of Physics and Applied Physics, University of Massachusetts Lowell, One University Ave, Lowell, MA, USA;3. Microsystems Engineering, Rochester Institute of Technology, Rochester, NY, USA |
| Abstract: | |
| Keywords: | antireflection coatings optical transmission plasmonics semiconductors, metallic films |