Affiliation: | (1) National Metrology Institute of Japan, AIST Tsukuba Central 3, 1-1-1, Umezono, Tsukuba, Ibaraki 305-8563, Japan;(2) Hudson Laboratory, Bethel Co., Suginami, Ishioka, Ibaraki 315-0027, Japan |
Abstract: | The thermal diffusivity of thin metal films has been measured by combining a fast infrared radiation thermometer with a mercury cadmium telluride (MCT) detector and a CO2 laser modulated at a radio frequency up to 2 MHz. The laser output beam modulated by an acousto-optic modulator (AOM) is directed to the front surface of the blackened copper thin film (10m thick, 9.5 mm in diameter). The thermal radiation from the back surface of the sample is detected. From the observed phase delay in the detected signal of 0.68 radian to the input laser beam, the thermal diffusivity is determined to be 1.11 × 10-4m2·s-1, which agrees well with the value of 0.99 × 10-4m2·s-1 calculated from literature results. The method is generally applicable for measurements of thermal properties of nano/micro materials.Paper presented at the Fifteenth Symposium on Thermophysical Properties, June 22--27, 2003, Boulder, Colorado, U.S.A. |