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磁控溅射Ni-Mn-Ga薄膜的磁致应变
引用本文:郭世海,张羊换,陈自新,李长生,王国清,王新林.磁控溅射Ni-Mn-Ga薄膜的磁致应变[J].功能材料与器件学报,2006,12(2):103-107.
作者姓名:郭世海  张羊换  陈自新  李长生  王国清  王新林
作者单位:钢铁研究总院功能材料所,北京,100081;江苏大学机械工程学院,镇江,212013
摘    要:采用直流磁控溅射的方法,在NaCl基底上沉积了Ni-Mn-Ga薄膜,对薄膜进行了形貌观察、微区成分及结构分析,并测量了薄膜的磁致应变.结果表明,薄膜表面可见大小不一的团簇颗粒,具有明显的岛状结构,表明Ni-Mn-Ga薄膜的形成为典型的核生长型机制.热处理前的薄膜具有部分非晶存在,热处理后薄膜晶化为多晶形态.无约束薄膜在磁场下呈现负的磁致应变,在1.3T磁场下,其最大应变值可达-0.008%,并且可以完全恢复.

关 键 词:Ni-Mn-Ga  形状记忆合金  薄膜  磁致应变
文章编号:1007-4252(2006)02-0103-05
收稿时间:2005-06-16
修稿时间:2005-09-27

Magnetic-field-induced strain of Ni-Mn-Ga thin films prepared by magnetron sputtering
GUO Shi-hai,ZHANG Yang-huan,CHEN Zi-xin,LI Chang-sheng,WANG Guo-qing,WANG Xin-lin.Magnetic-field-induced strain of Ni-Mn-Ga thin films prepared by magnetron sputtering[J].Journal of Functional Materials and Devices,2006,12(2):103-107.
Authors:GUO Shi-hai  ZHANG Yang-huan  CHEN Zi-xin  LI Chang-sheng  WANG Guo-qing  WANG Xin-lin
Affiliation:1. Department of Functional Material Research, Central Iron and Steel Research Institute, Beijing 100081, China; 2. School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
Abstract:Ni- Mn -Ga thin films were deposited by dc magnetron sputtering on NaCI substrates. The surface morphology, compositions and microstructures of the films were investigated and the magnetic - field -induced strain was measured. The results show that the films deposited on NaCl substrates have a surface with granules cluster of various sizes. A clear island structure of the films is observed, which indicates the films are formed by typical nuclear- growing mechanism. There is a partial amorphous state in the films before heat treatment. The heat treatment leads to polycrystalline state in the films. The freestanding thin films exhibit a recoverable shrink magnetic - field - induced strain of about - 0. 008% at the magnetic field of 1.3T.
Keywords:Ni - Mn - Ga  shape memory alloy  thin film  magnetic - field - induced strain
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