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云母表面不同厚度VO2薄膜的红外光学特性
引用本文:颜家振,黄婉霞,张月,何鹏,李宁.云母表面不同厚度VO2薄膜的红外光学特性[J].红外与激光工程,2011,40(7):1305-1309.
作者姓名:颜家振  黄婉霞  张月  何鹏  李宁
作者单位:四川大学制造科学与工程学院,四川成都,610064
基金项目:国家自然科学基金(61072036); 四川大学青年教师基金(校青2008051)
摘    要:以天然白云母的解理面为基底,采用无机溶胶-凝胶法在其表面制备不同厚度的VO2薄膜,并研究了厚度对VO2薄膜的微观结构和红外光学特性的影响.利用SEM、XRD等手段分析了薄膜的表面形貌和晶体结构,利用原位FTlR分析了VO2薄膜半导体-金属相变特性.结果表明,云母表面VO2薄膜室温下具有(011)择优生长取向,随着厚度增...

关 键 词:二氧化钒  薄膜厚度  热致相变  红外光学性能

Infrared optical properties of VO_2 films on muscovite substrate with different thickness
Yan Jiazhen,Huang Wanxia,Zhang Yue,He Peng,Li Ning.Infrared optical properties of VO_2 films on muscovite substrate with different thickness[J].Infrared and Laser Engineering,2011,40(7):1305-1309.
Authors:Yan Jiazhen  Huang Wanxia  Zhang Yue  He Peng  Li Ning
Affiliation:Yan Jiazhen,Huang Wanxia,Zhang Yue,He Peng,Li Ning(School of Manufacturing Science and Engineering,Sichuan University,Chengdu 610064,China)
Abstract:The films of VO2 with different thickness were fabricated on the cleavage plane of nature muscovite by an inorganic sol-gel method,in order to inverstigate the dependence of the thinckness on microstructure and infrared optical properties of the VO2 films.SEM and XRD were adopted to detect the morphology crystal structure of the films.In situ FTIR was carried out to analyze the semiconductor-metal phase transition properties of the films.The results show that the prepared films are(011) oriented on muscovit...
Keywords:vanadium dioxide  film thickness  thermochromism  infrared optical properties  
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