| 一种用于MEMS样品测试的六轴微力传感器 |
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| 引用本文： | 杨宏亮,鲍剑斌,王志勇,贺德建. 一种用于MEMS样品测试的六轴微力传感器[J]. 现代机械, 2004, 0(1): 15-16 |
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| 作者姓名： | 杨宏亮 鲍剑斌 王志勇 贺德建 |
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| 作者单位： | 华中科技大学机械科学与工程学院,430074 |
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| 摘 要： | 本文研制了一种用于MEMS样品测试的六轴微力传感器。首先采用有限元法对特定结构的传感器进行了静力学分析 ,确定了其布片方案 ;然后通过软件实现对传感器输出进行六轴力 /力矩的解耦 ,这大大简化了后置解耦电路的设计并降低了成本 ;最后本文给出了六轴微力传感器的标定曲线 ,证明其可用于MEMS做样品力学特性测试。
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| 关 键 词： | 六轴力/力矩传感器 有限元分析 解耦 标定矩阵 |
| 修稿时间： | 2003-10-14 |
A Six DOF Force/Torque Sensor Used in MEMS Sample Testing |
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| Yang Hong-liang Bao Jian-bin Wang Zhi-yong He De-jian. A Six DOF Force/Torque Sensor Used in MEMS Sample Testing[J]. Modern Machinery, 2004, 0(1): 15-16 |
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| Authors: | Yang Hong-liang Bao Jian-bin Wang Zhi-yong He De-jian |
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| Affiliation: | Yang Hong-liang Bao Jian-bin Wang Zhi-yong He De-jian |
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| Abstract: | This paper presents a kind of six degree-of-freedom force/torque sensor used in MEMS sample testing. Based on the statics analysis of the special structure of the sensor, a scheme of the foil distribution is put forward. Then the outputs of the sensor are decoupled by programming method, so the sensor has the advantages of simple decoupling circuit, low cost and so on. At last it gives the calibration curve of the sensor, and proves that the sensor is suitable for the mechanics testing of MEMS samples. |
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| Keywords: | six-dof-force/torque sensor FEA decoupling calibration matrix |
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