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用MOCVD方法制备的GaN_(1-x)P_x三元合金的喇曼与红外光谱
引用本文:张开骁,沈波,陈敦军,张荣,施毅,郑有炓,李志锋,陆卫. 用MOCVD方法制备的GaN_(1-x)P_x三元合金的喇曼与红外光谱[J]. 半导体学报, 2004, 25(1): 48-51
作者姓名:张开骁  沈波  陈敦军  张荣  施毅  郑有炓  李志锋  陆卫
作者单位:南京大学物理系 南京210093(张开骁,沈波,陈敦军,张荣,施毅,郑有炓),中国科学院上海技术物理研究所红外物理国家重点实验室 上海200083(李志锋),中国科学院上海技术物理研究所红外物理国家重点实验室 上海200083(陆卫)
基金项目:国家重点基础研究发展计划(973计划) , 国家自然科学基金 , 国家高技术研究发展计划(863计划)
摘    要:采用光辐射加热低压金属有机化学气相淀积(L P- MOCVD)方法在蓝宝石衬底上生长了高P组分的Ga N1 - x-Px 三元合金薄膜,通过喇曼光谱和红外反射谱技术研究了Ga N1 - x Px 合金中P掺杂所引入的振动模.与非掺P的Ga N相比,在Ga N1 - x Px 合金的喇曼谱和红外反射谱中分别观测到了多个由P所引入的振动模,文中将它们分别归因于Ga- P键振动引起的准局域模、间隙模以及P掺入造成的局部晶格无序激活的振动模

关 键 词:GaN1-xPx   MOCVD   喇曼   红外反射
文章编号:0253-4177(2004)01-0048-04
修稿时间:2003-01-31

Raman and Infrared Spectra Study of GaN1-xPx Ternary Alloys Grown by MOCVD
Zhang Kaixiao ,Shen Bo ,Chen Dunjun ,Zhang Rong ,Shi Yi ,Zheng Youdou ,Li Zhifeng and Lu Wei. Raman and Infrared Spectra Study of GaN1-xPx Ternary Alloys Grown by MOCVD[J]. Chinese Journal of Semiconductors, 2004, 25(1): 48-51
Authors:Zhang Kaixiao   Shen Bo   Chen Dunjun   Zhang Rong   Shi Yi   Zheng Youdou   Li Zhifeng   Lu Wei
Affiliation:Zhang Kaixiao 1,Shen Bo 1,Chen Dunjun 1,Zhang Rong 1,Shi Yi 1,Zheng Youdou 1,Li Zhifeng 2 and Lu Wei 2
Abstract:Both Raman and infrared reflection spectra for a series of high P compositional GaN 1-xP x alloys grown by means of light-radiation heating,low-pressure metal-organic chemical vapor deposition are investigated.The Raman spectra of GaN 1-x-P x alloys,recorded in backscattering geometry,exhibit four new vibrational modes at 256,314,377,and 428cm -1 compared with an undoped GaN sample.Those modes are assigned to the so called quasi-local mode induced by P in GaN,disorder-activated scattering and gap modes related to the Ga-P bond vibrations,respectively.The frequency of the A 1(LO) mode is found to redshift,which is attributed to the effects of alloying and strain.The infrared reflectance spectra show another new mode near 630cm -1,which is associated with the E 2(TO) phonon mode that results from a random distribution of the P atoms in GaN 1-xP x alloys and elimination of lattice translational symmetry.
Keywords:GaN 1-xP x  MOCVD  Raman  infrared reflection
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