| 超短激光脉冲烧蚀铜材料的数值模拟 |
| |
| 引用本文： | 梁建国,倪晓昌,杨丽,王清月.超短激光脉冲烧蚀铜材料的数值模拟[J].中国激光,2005,32(9):291-1294. |
| |
| 作者姓名： | 梁建国 倪晓昌 杨丽 王清月 |
| |
| 作者单位： | 天津大学精密仪器与光电子工程学院超快激光研究室,天津,300072;光电信息技术科学教育部重点实验室(天津大学)天津,300072 |
| |
| 基金项目： | 教育部科学技术研究重大项目（10410）、天津市科技发展计划科技攻关培育项目（G043103911）和中国博士后科学基金资助课题. |
| |
| 摘 要： | 使用约化后的双温方程（DTE）对超短激光脉冲烧蚀铜薄层的过程进行了数值模拟；基于超短激光脉冲烧蚀过程中电子与晶格的温度不平衡性，分别模拟了这两个系统的温升过程，并由此得到了单脉冲烧蚀深度；通过变化激光能流，研究了脉冲能量对烧蚀深度的影响。模拟结果表明，随着激光能流的增加，相变爆炸引起的喷射出现得越深，同时材料烧蚀深度越大；理论计算与实验结果相吻合。
|
| 关 键 词： | 激光技术 超快激光技术 有限差分 双温方程 烧蚀深度 |
| 文章编号： | 0258-7025（2005）09-1291-04 |
| 收稿时间： | 2004-10-27 |
| 修稿时间： | 2005-04-19 |
Numerical Simulation of the Ablation on Copper with Ultrashort Laser Pulses |
| |
| LIANG Jian-guo,Ni Xiao-Chang,YANG Li,WANG Qing-yue.Numerical Simulation of the Ablation on Copper with Ultrashort Laser Pulses[J].Chinese Journal of Lasers,2005,32(9):291-1294. |
| |
| Authors: | LIANG Jian-guo Ni Xiao-Chang YANG Li WANG Qing-yue |
| |
| Affiliation: | 1 Ultrafast Laser Laboratory, School of Precision Instruments and Optoelectronics Engineering , Tianjin University, Tianjin 300072, China;2 Key Laboratory of Optoelectronic In formation Technical Science, Ministry of Education , Tianjin 300072, China |
| |
| Abstract: | The ablation process of copper foil with ultrashort laser pulses was simulated by the double-temperature equation(DTE),which was formatted simply.The ablation rate of the copper was attained on the basis of the simulation of the electronic and lattice's temperature.The simulation results show that the greater the laser fluence is,the longer the duration of ablation lasts and more material is ablated.The experimental results are accorded with the theoretical analysis. |
| |
| Keywords: | laser technique ultrafast laser technique finite difference method double-temperature equation ablation depth |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
