| 准分子激光器用含氟混合气体配制与净化装置的建立 |
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| 引用本文： | 倪志强,孙娜,陈光华. 准分子激光器用含氟混合气体配制与净化装置的建立[J]. 低温与特气, 2005, 23(5): 26-28 |
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| 作者姓名： | 倪志强 孙娜 陈光华 |
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| 作者单位： | 核工业理化工程研究院,特种气体研究中心,天津,300180 |
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| 摘 要： | 根据准分子激光器的使用要求,建立了一套准分子激光器用含氟混合气体配制与净化装置,并规定了操作规程.按规程应用该装置配制的含氟混合气,可以使准分子激光器的有效工作时间延长2～3倍,激光器中镜面的使用寿命平均延长3～5倍.实践证明,该装置的建立是可行的.
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| 关 键 词： | 含氟混合气体 配制 净化 装置 |
| 文章编号： | 1007-7804（2005）05-0026-03 |
| 收稿时间： | 2005-05-27 |
| 修稿时间： | 2005-05-27 |
Setting up of The Preparation And Purification Device of Fluorine Mixed Gas Used in Excimer-Laser |
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| NI Zhi-qiang,SUN Na,CHEN Guang-hua. Setting up of The Preparation And Purification Device of Fluorine Mixed Gas Used in Excimer-Laser[J]. Low Temperature and Specialty Gases, 2005, 23(5): 26-28 |
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| Authors: | NI Zhi-qiang SUN Na CHEN Guang-hua |
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| Affiliation: | Research Center of Special Gas , Research Institute of Physical and Chemical Engineering of Nuclear Industry , Tianjin 300180 , China |
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| Abstract: | According to the request of excimer-laser,fluorine mixed gas preparation and purification device was set up,which used in excimer-laser,and specified operating instruction.The fluorine mixed gas prepared by this device,which may prolong the working hours of excimer-laser 2 to 3 times and prolong the average useful time of lens of laser 3 to 5 times.The results show that this device is feasible. |
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| Keywords: | fluorine mixed gas preparation purification device |
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