| 类金刚石膜的性质和制备及应用 |
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| 引用本文： | 张敏,程发良,姚海军. 类金刚石膜的性质和制备及应用[J]. 表面技术, 2006, 35(2): 4-6,9 |
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| 作者姓名： | 张敏 程发良 姚海军 |
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| 作者单位： | 东莞理院生物传感器研究中心,广东,东莞,523106;东莞理院生物传感器研究中心,广东,东莞,523106;东莞理院生物传感器研究中心,广东,东莞,523106 |
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| 基金项目： | 中国科学院资助项目 , 广东省博士启动基金 , 广东省科技攻关项目 , 广东省教育厅自然科学基金 |
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| 摘 要： | 介绍了类金刚石膜的性能、制备方法以及应用.类金刚石膜(DLC)是由sp3键组态的碳和sp2键组态的碳混合组成的碳材料,由于具有与金刚石膜(DF)相似的性能--优异的光学特性、机械特性、电学特性和化学特性,同时现行制备方法(化学气相沉积,物理气相沉积等)相对容易实现,并且其产品已经应用到光学、医学、机械、电子等多个领域,因此引起人们极大兴趣.
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| 关 键 词： | 类金刚石膜(DLC) 杂化轨道 性质 应用 制备 沉积 |
| 文章编号： | 1001-3660（2006）02-0004-03 |
| 收稿时间： | 2005-12-20 |
| 修稿时间： | 2005-12-20 |
Properties, Preparation and Applications of Diamond-like Carbon Films |
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| ZHANG Min,CHENG Fa liang,YAO Hai jun. Properties, Preparation and Applications of Diamond-like Carbon Films[J]. Surface Technology, 2006, 35(2): 4-6,9 |
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| Authors: | ZHANG Min CHENG Fa liang YAO Hai jun |
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| Affiliation: | Research Centre of Biological Sensor, Dongguan University of Science and Technology, Dongguan 523106, China |
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| Abstract: | The properties,the applications and the deposition methods of DLC film are briefly discussed.Diamond-like carbon film(DLC) is a carbon material that consists of sp~3 hybrid orbital and sp~2 hybrid orbital phases.Because DLC film has excellent mechanical,electric,optical,thermal,biocompatible properties which is similar to diamond film(DF),meanwhile the fabrication of DLC film is easy to be achieved;Now the main preparation methods are PVD,CVD and etc..People have great interests in it.Now DLC film has been used in optics,medicine,mechanism,electron fields etc.. |
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| Keywords: | Diamond-like carbon film(DLC) hybrid orbital orbital Properties Applications Preparation Deposition |
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