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Scan nonlinearity of a scanning electron microscope |
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| Authors: | V. V. Alzoba V. P. Gavrilenko A. Yu. Kuzin V. B. Mityukhlyaev A. V. Rakov P. A. Todua M. N. Filippov |
| Affiliation: | 1. Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV), Moscow, Russia 2. Moscow Institute of Physics and Technology (MFTI), Dolgoprudnyi, Russia 3. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN), Moscow, Russia |
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