Theory experiment comparison of the electron backscattering factor from solids at low electron energy (250-5,000 eV) |
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| Authors: | El Gomati M M Walker C G H Assa'd A M D Zadrazil M |
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| Affiliation: | Department of Electronics, University of York, Heslington, York, UK. mmg@ohm.york.ac.uk |
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| Abstract: | The electron backscattering factor was measured from 24 different elements at low primary beam energy (250-5,000 eV). The results were compared with Monte Carlo simulations from a variety of freely available programs and an in-house developed program. The results suggest that a thin film of oxide can modify the backscattering factor at low primary energy. In addition, a number of problems have been identified with the freely available programs. |
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| Keywords: | Monte Carlo electron backscattering factor low energy stopping power |
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