PNN‐PZN‐PMN‐PZ‐PT Multilayer Piezoelectric Ceramic with Low Sintering Temperature

Multilayer piezoelectric ceramic material with a composition of 0.1Pb(Ni_1/3Nb_2/3)O₃‐0.35Pb(Zn_1/3Nb_2/3)O₃‐0.15Pb(Mg_1/3Nb_2/3)O₃‐0.1PbZrO₃‐0.3PbTiO₃‐4 mol% excess NiO (0.1PNN‐0.35PZN‐0.15PMN‐0.10PZ‐0.3PT‐0.04NiO) was fabricated by a roll‐to‐roll tape casting process and co‐fired with Ag/Pd electrode at low temperature of 950°C. Their dielectric, piezoelectric, and ferroelectric properties were evaluated. The effective piezoelectric coefficient d₃₃ of the obtained multilayer piezoelectric material was 412 pm/V, while d₃₃ for the ceramic pellet was 503 pm/V. Piezoelectric displacement measurements revealed small displacement hysteresis for the multilayer material. The combined characteristics of the multilayer piezoelectric material using the selected composition showed the potential for high power, high strain, and high force actuation applications. In addition, as the composition had a tetragonal phase, which substantially deviated from morphotropic phase boundary (MPB), the excellent properties may be more tolerant to stoichiometric fluctuation, which can allow larger processing and composition window as desired for scalable production.