薄膜热电偶热电特性分析与试验

薄膜热电偶具有体积小、操作简便、准确度高等优点,在精确测温领域显出了极大优势。采用磁控溅射法生产的热电偶在材料组合上几乎是无限的。本文对Ni CrNi Si薄膜热电偶、Ni Cr SiNi Si Mg薄膜热电偶静态下的重复性、使用寿命、温度上限等进行对比、分析,以便在使用中可以更好地"因地制宜"。与大连某高校制作的薄膜热电偶进行对比试验,验证制作工艺对薄膜热电偶性能的重要影响。薄膜热电偶作为一种新型热电偶,在发动机叶片等特殊部件表面测温领域具有广泛的应用前景。

Thermo-electric Property Analysis and Experiment of Thin-film Thermocouple

Thin-film thermocouples have advantages of small volume,simplicity of operation,high accuracy,etc.In some special cases for accurate temperature measurement,they show the great advantage.By means of magenetron sputtering method in the production of thermocouples,the material composition possibilities are almost unlimited.In this article,the NiCr/NiSi thin-film thermocouple is compared to the NiCrSi/NiSiMg thin-film thermocouple in terms of static repeatability,service life and temperature limit,in order to better adjust measures to local conditions.And a compare test was done with a thin-film thermocouple produced by a university in Dalian,verifying the important role of the process on the properties of thin-film thermocouples.Thin-film thermocouples as a new type of thermocouples have a wide application prospect for surface temperature measurement of engine blades and other special parts.