High-Δn silica-on-silicon channel waveguides based on sol-gelgermanophosphosilicate glass |
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| Authors: | Syms R.R.A. Schneider V.M. Huang W. Ahmad M.M. |
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| Affiliation: | Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London; |
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| Abstract: | A process for fabrication of high-Δn silica-on-silicon channel waveguides by spin-coating and rapid thermal annealing of sol-gel germanophosphosilicate glass is described. A recipe for the preparation of stable sols and a parameter range for deposition of crack-free films are given. Low and spectrally flat insertion loss is demonstrated for singlemode guides with a Δn of 1.5×10-2 |
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