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A precision robot system with modular actuators and MEMS micro gripper for micro system assembly
Authors:BongSeok Kim  Joon-Shik Park  Chanwoo Moon  Gu-Min Jeong  Hyun-Sik Ahn
Affiliation:(1) Intelligent mechatronics research center, Korea Electronic Technology Institute, 401-402 B/D 193 Yakdae-Dong, Wonmi-Gu, Buchon-Si, KyoungGi-Do, Korea;(2) Nano mechatronics research center, Korea Electronic Technology Institute, Wonmi-Gu, Buchon-Si, KyoungGi-Do, Korea;(3) College of Electrical Engineering and Computer Science, Kookmin University, 861-1 Jeongneung-Dong, Seongbuk-Gu, Seoul, Korea
Abstract:A robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. The developed P-R-R type 3 DOF robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this manipulator, a micro gripper is designed and fabricated with MEMS technology, and the displacement of the jaw is up to 142.8 μm. A real gripping test is conducted to evaluate the robotic system.
Keywords:Precision robot system  Modular actuator  MEMS gripper  Micro system assembly
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