Effect of metallic interfacial layers on the properties of diamond-like carbon thin films |
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Authors: | Neeraj?Dwivedi Email author" target="_blank">Sushil?KumarEmail author C?Sreekumar Saurabh?Dayal C?M?S?Rauthan O?S?Panwar |
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Affiliation: | 1.Physics of Energy Harvesting Division,National Physical Laboratory (CSIR),New Delhi,India;2.Department of Physics,Indian Institute of Technology Delhi,New Delhi,India |
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Abstract: | Diamond like carbon (DLC) thin films with metallic interfacial layers of aluminum and nickel-chromium (Al and Ni-Cr) were
grown using a low cost hybrid technique involving a resistive heating thermal evaporator and radio frequency plasma enhanced
chemical vapor deposition techniques. Stress, hardness, elastic modulus, bonding, phase, and electrical conductivity of these
films were investigated. Introduction of interfacial Al and Ni-Cr layers in DLC led to drastic improvement of its conductivity
along with a significant reduction in residual stress but with some reduction of hardness and the elastic modulus. The structural
and surface properties of thin films were studied using X-ray diffraction, X-ray photoelectron spectroscopy, and scanning
electron microscopy techniques. |
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