Growth and structure of wide-gap insulator films on SrTiO3

Wide-gap insulator films, CaZrO₃, CaHfO₃, LaGaO₃, and NdGaO₃, were grown on SrTiO₃(1 0 0) substrates with the aim of obtaining a gate insulator for epitaxial oxide devices. We show that CaZrO₃ and CaHfO₃ films were epitaxial and had a multi-domain in-plane structure due to their highly distorted perovskite structure. Most of the LaGaO₃ and NdGaO₃ films were polycrystalline, and therefore showed relatively high leak currents. CaHfO₃ had the best crystallinity among these four materials.