| 电蚀抛光CVD金刚石膜的实验研究 |
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| 引用本文： | 郭钟宁,王成勇,匡同春,王晓初,黄志刚.电蚀抛光CVD金刚石膜的实验研究[J].金刚石与磨料磨具工程,2000(6):6-9,12. |
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| 作者姓名： | 郭钟宁 王成勇 匡同春 王晓初 黄志刚 |
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| 作者单位： | 广东工业大学 510090 |
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| 基金项目： | 国家自然科学基金和广东省自然科学基金资助项目。 |
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| 摘 要： | 本文提出了一种新的ＣＶＤ金刚石膜抛光技术。采用该项技术，可以高效率的完成ＣＶＤ金刚石膜的粗抛光。ＣＶＤ金刚石膜表面被预先涂覆一层导电金属，然后采用电蚀方法对该表面进行加工，使金刚石膜突起的尖峰被迅速去除。加工中金刚石表面的石墨化使电蚀加工得以不断延续。通过单脉冲放电试验已经发现涂覆层的材料对金刚石膜的加工效果有很大影响。与普通金属加工相比，金刚石膜的电蚀过程有其完全不同的特征。通过试验和分析，本文还对金刚石膜的电蚀去除机理进行了初步探讨。
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| 关 键 词： | 金刚石膜 抛光 电蚀加工 CVD 实验研究 |
A Study on the Polishing of CVD Diamond Film by Electromachining Method |
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| by Guo Zhongning et al.A Study on the Polishing of CVD Diamond Film by Electromachining Method[J].Diamond & Abrasives Engineering,2000(6):6-9,12. |
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| Authors: | by Guo Zhongning |
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| Affiliation: | by Guo Zhongning et al |
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| Abstract: | A new technique for polishing CVD diamond film has been investigated, by which rough polishing of CVD diamond film can be efficiently carried out. Diamond film is coated with a thin layer of conductive material in advance, and then EDM method is used to machine the coated surface. As a result, peaks on the surface of diamond film are removed rapidly. During the machining, graphitization of the surface of CVD diamonds film enables EDM process to continue. The discharge experiment of single pulse shows that the material of the coated layer will evidently affect the removal volume of CVD diamond film. Compared with the machining of ordinary metal, the process of ED machining of CVD diamond film has quite different characteristics. By means of the experimental observation and the analysis of the experimental results, the removal mechanism of CVD diamond film has been discussed. |
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| Keywords: | CVD diamond film\ polishing\ electro discharge machining |
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