节瘤缺陷对薄膜热力损伤的有限元分析

在多层介质薄膜中,节瘤缺陷是影响薄膜激光损伤的关键因素。为了理解节瘤缺陷对薄膜激光损伤的影响,以热传导理论为依据,通过有限元方法模拟了多层介质薄膜中的节瘤缺陷在激光辐照下的热力响应,分析了节瘤缺陷的大小和深度对热力响应的灵敏度。发现大而浅的节瘤缺陷有较高的热力响应灵敏度,因此,消除直径较大的膜层表面附近的缺陷有助于提高薄膜抗激光损伤的能力。

Thermal-stress response of nodule defects in multi-layer optical thin film based on finite element method

Nodule defects on dielectric multi-layer optical thin film are key factors resulting in laser-induced damage. In order to understand the influence of nodule defects on laser-induced damage of optical thin film, the thermal-stress response of nodule defects on multi-layer optical thin film illuminated by laser is simulated based on heat conduction theory and finite element analysis. The sensitivity of nodule defect size and depth to thermal-stress response is analyzed. It is discovered that large and shallow nodule defects have higher thermal-stress response sensitivity. As a result, the elimination of defects with larger diameters near surface layer helps to improve the anti-damage capability of optical thin film.