|
|||||
|
|
Rapid thermal two-stage metal-organic chemical vapor deposition growth of epitaxial BaTiO3 thin films |
|
| Authors: | O. Kreinin N.P. Kuzmina A.R. Kaul |
| Affiliation: | a Department of Materials Engineering, Technion — Israel Institute of Technology, Haifa 32000, Israel b Department of Chemistry, Moscow State University, Leninskie Gory, Moscow 119992, Russia |
| Abstract: | |
| Keywords: | BaTiO3 MOCVD Metal-organic precursors Thin films |
| 本文献已被 ScienceDirect 等数据库收录！ | |