Carbon incorporation process in GaAsN films grown by chemical beam epitaxy using MMHy or DMHy as the N source |
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Authors: | H. Suzuki K. Nishimura H.S. Lee Y. Ohshita N. Kojima M. Yamaguchi |
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Affiliation: | Toyota Technological Institute, 2-12-1 Hisakata, Tempaku-ku, Nagoya, Aichi 468-8511, Japan |
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Abstract: | Crystal quality of GaAsN films can be improved by using CBE for low-temperature growth. However, low-temperature growth increases C incorporation in the films, which degrades their electrical properties. Consequently, C incorporation was investigated in view of the surface reaction of N sources on a substrate surface, and MMHy and DMHy were compared. When MMHy was used as an N source, C concentration in GaAsN drastically increases below 380 °C than that in GaAs due to insufficient CHx desorption. In the case of DMHy, N(CH3)2 is desorbed more readily than CHx, therefore, the C concentration can then be reduced using DMHy. |
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Keywords: | Gallium arsenide nitride Chemical beam epitaxy Temperature programmed desorption Impurities |
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