| 透明台阶的白光干涉测量方法研究 |
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| 引用本文： | 耿东锋,何英杰,苏宏毅. 透明台阶的白光干涉测量方法研究[J]. 光学仪器, 2013, 35(6): 74-77 |
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| 作者姓名： | 耿东锋 何英杰 苏宏毅 |
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| 作者单位： | 中国空空导弹研究院, 河南 洛阳 471009;红外探测器技术航空科技重点实验室, 河南 洛阳 471009;中国空空导弹研究院, 河南 洛阳 471009;中国空空导弹研究院, 河南 洛阳 471009;红外探测器技术航空科技重点实验室, 河南 洛阳 471009 |
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| 摘 要： | Veeco NT3300表面轮廓仪是基于白光干涉原理的一种非接触测量设备,它的垂直扫描干涉模式可以实现对物体表面形貌的非接触测量。在利用垂直扫描干涉模式对光刻胶形成的透明台阶测量时,设置不同的测量参数会导致较大的测量误差,通过对垂直扫描干涉模式的原理和测量系统的分析,找到了误差产生的原因,并通过合理的测量参数的设置,实现了对透明台阶的准确测量,满足了应用需求。
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| 关 键 词： | 垂直扫描干涉 零光程差 透明台阶 |
| 收稿时间： | 2013-05-13 |
Study on the measurement of transparent step by white-light interferometer |
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| GENG Dongfeng,HE Yingjie and SU Hongyi. Study on the measurement of transparent step by white-light interferometer[J]. Optical Instruments, 2013, 35(6): 74-77 |
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| Authors: | GENG Dongfeng HE Yingjie SU Hongyi |
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| Affiliation: | China Airborne Missile Academy, Luoyang 471009, China;Aviation Key Laboratory of Science and Technology on Infrared Detector, Luoyang 471009, China;China Airborne Missile Academy, Luoyang 471009, China;China Airborne Missile Academy, Luoyang 471009, China;Aviation Key Laboratory of Science and Technology on Infrared Detector, Luoyang 471009, China |
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| Abstract: | As non-contact optical profilers, Veeco NT3300 works on the principle of white-light interference, the object's surface is measured without contact by its vertical scanning interferometer model. During the measurement of steps which are transparent for white-light, significant measurement offset is always observed because of different scanning parameters setting. Therefore, the principle of vertical scanning interferometer model and the measuring systems is analyzed and the factors leading to offset are also found. At last, the precise measurement results for transparent steps are obtained to meet application requirements. |
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| Keywords: | vertical scanning interferometer zero optical path difference transparent step |
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