世界硅材料工业发展概况

文中以详尽的数据和事实分析了近几年世界半导体硅材料工业的发展及未来趋势。指出：欧、美、日各国的硅材料工业近几年产量增加、效益看好，仍然是各国的投资热点，大直径化的发展速度非常快，估计1998年Φ200mm硅片的产量将达到380万片／月，而且Φ300mm和Φ400mm硅片的研制已经在国际大协调的局面下启动。与此相适应，为了满足亚微米器件的需求，硅片的质量水平也在不断提高，从世界各地区的发展趋势看，存在着明显的不平衡，亚太地区显著地优于其他地区，此外，对多晶硅的大量需求与多晶硅生产能力不足的矛盾正成为硅材料工业发展的瓶颈，估计这种局面要到1997年后才能有所改观。

SURVEY OF THE DEVEOLPMENT OF THE INDUSTRY OF SILICON MATERIALS IN THE WORLD

The recent development of the industry of somiconductor silicon material in theworld and its trend are analyzed in this paper with detailed data and facts. It is pointed outthat in recent years in Europe, America and Japan the output of silicon material is increasedand benefit becomes better, this industry is still hot for investment in various countries. Theproduction of wafers of large diameter is increased rapidly as an cstimation. 3800 thousandwafers/month wi1l be reached in l998 the preparation of silicon wafers of 300mm and 400mm isstarted under international coordinationl corresPolldingly, the quality of silicon wafers is imp-roved continously to satisfy the requirements of submicron devicesl the disequilibrium of thedevelopment of this industry in the world is evident, it is remarkably superior in Asia-pacificarea than in other areas besides, the deficiency of productivc capacity of polycrystal siliconbccomes the bottle-neck of the deyelopment of siliLon material industry, and this situation Willprolong to the end of 1997 and after.