| 激光法纳米硅粉的制备工艺研究 |
| |
| 引用本文： | 王卫乡,刘颂豪,梅宴标,廖健宏,陈强,陈可心,张有.激光法纳米硅粉的制备工艺研究[J].应用激光,1995(1). |
| |
| 作者姓名： | 王卫乡 刘颂豪 梅宴标 廖健宏 陈强 陈可心 张有 |
| |
| 作者单位： | 华南师范大学量子电子学研究所 |
| |
| 基金项目： | 广东省高教局重点学科和广东省基金 |
| |
| 摘 要： | 本文研究了制备纳米硅粉的工艺参数：获得了最佳工艺参数：激光功率密反１６００Ｗ／ｃｍ２，硅烷浓度１０％，高纯氩稀释，反应气体流量１００ｃｍ３／ｓ，反应池压力２６．７ｋＰａ。改变工艺参数可制备不同粒度的纳米硅粉。
|
| 关 键 词： | 激光，纳米硅粉 |
Study on the Preparation Techniques of Laser-induced Chemical Vapor Deposited Nanosized Silicon Powders |
| |
| Abstract: | It has been studied that how the preparation techniques affect the characteristics of nanosized silicon powders synthesized by laser-induced chemical vapor deposition. The optimum preparation conditions are as follows. The power density of CO2 Laser is 1600W/cm2. The concentration of silane is 10 Vol.%. The dilution gas is argon of high purity. The flow rate of reactive gases is 100cm3/s. And the pressure of reaction cell is 26. 7kpa |
| |
| Keywords: | laser nanosized silicon powders |
| 本文献已被 CNKI 等数据库收录！ |
