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Three-dimensional composition mapping of NiSi phase distribution and Pt diffusion via grain boundaries in Ni2Si |
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| Authors: | Dominique Mangelinck Khalid Hoummada Alain Portavoce Carine Perrin Rachid Daineche Marion Descoins David J. Larson Peter H. Clifton |
| Affiliation: | 1. Imec, Kapeldreef 75, B-3001 Leuven, Belgium;2. Department of Electrical Engineering, Katholieke Universiteit, Leuven 3001, Belgium;3. Department of Physics and Astronomy, Katholieke Universiteit, Leuven 3001, Belgium |
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