| 射流圆孔靶的制备和靶参数测量 |
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| 引用本文： | 叶君建,何钜华,谢志勇,王琛,傅思祖.射流圆孔靶的制备和靶参数测量[J].原子能科学技术,2010,44(8):999-1002. |
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| 作者姓名： | 叶君建 何钜华 谢志勇 王琛 傅思祖 |
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| 作者单位： | 上海激光等离子体研究所，上海201800 |
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| 基金项目： | 国家高技术研究发展计划资助项目 |
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| 摘 要： | 介绍了X射线激光射流实验中Al和CH两种射流圆孔靶的制备方法。分别采用精密机械和皮秒激光加工工艺在Al和CH薄膜上制备精密、微小的圆孔，再通过精密装配的方法获得射流圆孔靶。使用白光干涉仪和小型量测仪对射流圆孔靶进行靶参数测量，测量图像和数据表明，Al和CH薄膜圆孔的孔径较圆且两面大小一致性较好，靶的两层薄膜分界面清晰且连接紧密。
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| 关 键 词： | 射流 Al 圆孔靶 |
Fabrication and Measurement of Hole Targets in Jets Experiment |
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| YE Jun-jian,HE Ju-hua,XIE Zhi-yong,WANG Chen,FU Si-zu.Fabrication and Measurement of Hole Targets in Jets Experiment[J].Atomic Energy Science and Technology,2010,44(8):999-1002. |
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| Authors: | YE Jun-jian HE Ju-hua XIE Zhi-yong WANG Chen FU Si-zu |
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| Affiliation: | Shanghai Institute of Laser and Plasma, Shanghai 201800, China |
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| Abstract: | The hole targets in X-ray laser jets experiments were fabricated. Holes were drilled by drill press in Al and CH films by machine and pico-second laser. The hole targets were assembled by precision assemblage and measured by Wyko NT 1100 surface profiler and 2 dimensions coordinate measuring machine. The apertures are fine and the same between face and con-face, and the interface of layers are connected closely and seem clear. |
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| Keywords: | Al |
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