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量子阱材料的电子显微镜及光致发光研究
引用本文:范缇文,张永航,曾一平,陈良惠,徐统. 量子阱材料的电子显微镜及光致发光研究[J]. 半导体学报, 1990, 11(9): 706-708
作者姓名:范缇文  张永航  曾一平  陈良惠  徐统
作者单位:中国科学院半导体研究所,中国科学院半导体研究所,中国科学院半导体研究所,中国科学院半导体研究所,美国犹他大学材料科学和工程系 北京 中国科学院北京电子显微镜实验室,北京,北京,北京
摘    要:对GaAs/Al_xGa_(1-x)As量子阱材料进行的光致发光(PL),横断面透射电子显微镜(XTEM)和反射电子显微镜(REM)的研究结果表明量子阱材料的结构质量对其光电性能有一定影响。另外,也观察到分子束外延对改进异质结界面的平整度有明显作用。

关 键 词:量子阱材料 电子显微镜 光致发光

Electron Microscopy and Photoluminescence Studies of GaAs/Al_xGa_(1-x)As Quantum wells
Fan Tiwen/Institute ot Semiconductors,Academia Sinica China,Beijing Laboratory of Electron Microscopy,Academia Sinica ChinaZhang Yonghang/Institute ot Semiconductors,Academia Sinica ChinaZeng Yiping/Institute ot Semiconductors,Academia Sinica ChinaChen Lianghui/Institute ot Semiconductors,Academia Sinica ChinaHsu Tung/. Electron Microscopy and Photoluminescence Studies of GaAs/Al_xGa_(1-x)As Quantum wells[J]. Chinese Journal of Semiconductors, 1990, 11(9): 706-708
Authors:Fan Tiwen/Institute ot Semiconductors  Academia Sinica China  Beijing Laboratory of Electron Microscopy  Academia Sinica ChinaZhang Yonghang/Institute ot Semiconductors  Academia Sinica ChinaZeng Yiping/Institute ot Semiconductors  Academia Sinica ChinaChen Lianghui/Institute ot Semiconductors  Academia Sinica ChinaHsu Tung/
Affiliation:Fan Tiwen/Institute ot Semiconductors,Academia Sinica China,Beijing Laboratory of Electron Microscopy,Academia Sinica ChinaZhang Yonghang/Institute ot Semiconductors,Academia Sinica ChinaZeng Yiping/Institute ot Semiconductors,Academia Sinica ChinaChen Lianghui/Institute ot Semiconductors,Academia Sinica ChinaHsu Tung/Department of Materials Sciences and Engineering,University of Utah,USA
Abstract:Using XTEM, REM and PL, the effect of structural quality on the optoelectronic properties of GaAs/Al_xGa_(1-x)As quantum wells grown by MBE has been studied. In addition, theexperimental results reveal that the flatness of interfaces in heterostructures can be improvedby MBE technique.
Keywords:Quantum well  Molecular beam epitaxy  Photoluminescence  Electron microscopy  Interface
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