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The correlation between surface acoustic wave velocity and mechanical properties of TiN and TiNx coatings |
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| Authors: | J.D. Comins W. Pang A.G. Every D. Pietersen |
| Affiliation: | aDepartment of Physics, University of the Witwatersrand, Johannesburg, WITS 2050, South Africa bAtomic Energy Corporation of S.A. Ltd, P.O. Box 582, Pretoria, South Africa |
| Abstract: | Surface Brillouin scattering is used to study a variety of acoustic excitations in TiN films on high speed and mild steel. The dispersion relation is measured and calculated using surface Green's functions. Reduced elastic constants of the thinner films are necessary to produce agreement between theory and experiment. This is considered to be the result of an interface layer consisting mainly of titanium oxide (TiO) as identified by XPS measurements. In TiNx films the residual stress and critical load are well correlated with the surface acoustic wave velocity. |
| Keywords: | Brillouin scattering Thin films TiN Elastic properties |
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