脉冲磁控溅射制备硼掺杂氧化锌纳米薄膜的光学特性研究

采用脉冲磁控溅射法制备硼掺杂氧化锌（ZnO：B）纳米薄膜，研究了其结构和光学特性，经XRD分析，ZnO：B为多晶纳米薄膜，具有六方钎锌矿结构，薄膜沿着c轴取向择优生长。薄膜在可见光和近红外光谱区的透光性很好，其中在可见光区的平均透光率可达84％以上，而在近红外区的透光率随着波长增加而逐渐降低至45％。在可见光区，ZnO：B纳米薄膜的光学常数随波长的变化很小且数值基本趋于恒定，而在紫外区，光学常数随波长的变化很明显，并且在367nm和397nm附近存在两个紫外发光峰。

Optical Properties of Boron-doped Zinc Oxide Transparent Conducting Nano Thin Films Deposited by Pulsed Magnetron Sputtering

Boron-doped ZnO nano thin films were deposited by pulsed magnetron sputtering,and the structural and optical properties were investigated. According to XRD analysis,ZnO：B was polycrystalline nano thin film with hexagonal wurtzite structure,growed along c-axis preferentially. It exhibited high optical transmittance in both visible and NIR spectral region. The average transmittance was over 84% in visible region, and reached 45% decreasingly at last in NIR region. The pointwise unconstrained optimization method was applied to calculate the optical constants of the film - refractive index, extinction coefficient, and real and imaginary part of dielectric constants. The optical constants tended to be unchanged in visible range,but changed obviously in UV range,where two UV emission peaks were found （around 367 nm and 397 nm）.